러시아 NCG사에서 공급하는 웨이퍼/SiC ingot 생산장비
첨부 파일 참고
1. Silicon carbide wafers (SiC)
Silicon carbide wafers, 6H polytype, diameter 50.8 mm
Silicon carbide wafers, 6H polytype, diameter 76.2 mm
2. Aluminium nitride wafers (AlN)
Aluminium nitride wafers, diameter 15 mm
Aluminium nitride wafers, diameter 50 mm
3. Templates GaN on sapphire
Templates GaN on sapphire, diameter 50,8 mm